| 摘要 |
PROBLEM TO BE SOLVED: To provide a remote monitoring system that can remotely monitor and control a plurality of polishing end point detection devices.SOLUTION: A remote monitoring system includes: a plurality of polishing end point detection devices 10; and a host computer 20 connected to the plurality of polishing end point detection devices 10 via a network 1. The host computer 20 includes: a memory for storing polishing end point detection data sent from the plurality of polishing end point detection devices 10; and a display screen for displaying the polishing end point detection data. The host computer 20 sends a new polishing end point detection recipe to at least one polishing end point detection device selected from the plurality of polishing end point detection devices 10, and rewrites the polishing end point detection recipe of the selected at least one polishing end point detection device. |
