LOW PRESSURE VAPOR PHASE DEPOSITION OF ORGANIC THIN FILM

摘要

PROBLEM TO BE SOLVED: To provide a method for forming an organic thin film on a substrate 58.SOLUTION: A method for forming an organic thin film on the substrate 58 includes a step of providing a plurality of organic precursors (14, 48) in the vapor phase, and reacting the plurality of organic precursors (14, 48) at less than atmospheric pressure. Also the thin film produced by such a method and an apparatus used to conduct such a method are included. The method is well-suited to the formation of an organic light emitting device and other display-related technologies.