发明名称 ABSOLUTE PRESSURE MEASURING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide an absolute pressure measuring device capable of improving measurement accuracy by predicting a numerical value of zero drift and continuously performing correction on the basis of the numerical value.SOLUTION: In an absolute pressure measuring device 20 including a body capsule in which an enclosed liquid is enclosed, a vacuum chamber 11 which is provided on one side face of the body capsule and in which a vacuum pressure is enclosed, and a measurement chamber 10 which is provided on the other side face of the body capsule and receives a measurement pressure, the device includes: a correction operation circuit 224 for computing an inclination angle value of the absolute pressure measuring device capable of correcting a vacuum degree zero drift value by an inclination angle zero drift value continuously with the lapse of time from a vacuum degree zero drift predicted curve on which the absolute pressure measuring device 20 generates zero drift by the decline of a vacuum degree with the lapse of time and an inclination angle zero drift curve generated on the basis of the enclosed liquid by tilting the absolute pressure measuring device; and absolute pressure measuring device turning means 22 for continuously tilting the absolute pressure measuring device with the lapse of time on the basis of signals from the correction operation circuit.
申请公布号 JP2013178154(A) 申请公布日期 2013.09.09
申请号 JP20120041929 申请日期 2012.02.28
申请人 YOKOGAWA ELECTRIC CORP;YOKOGAWA METERS &amp, INSTRUMENTS CORP 发明人
分类号 G01L7/00 主分类号 G01L7/00
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