| 摘要 |
<p>The purpose of the present invention is to provide a scanning electron microscope capable of both increased resolution and improved pattern identification ability. In order to achieve same, a scanning electron microscope comprising a monochromator (20) that makes an electron beam (3) monochromatic is provided, wherein: the monochromator comprises a magnetic field generator (21) that deflects the electron beam, and an energy selection aperture (23) that allows part of the electron beam deflected by the magnetic field generator to pass therethrough; and an aperture (27) that allows some of the electrons emitted by a sample to pass therethrough and detectors (28, 29) that detect electrons that have passed through said aperture, are arranged upon an orbit to which the electrons emitted from the sample are deviated by the magnetic field generated by the magnetic field generator.</p> |
