| 摘要 |
<p>PURPOSE: A remote monitoring system of a polishing end point detecting device is provided to reduce detection errors without moving to the polishing end point detecting device by correcting a detection recipe and examining the causes of the detection errors in a polishing end point from a host computer. CONSTITUTION: A plurality of polishing end point detecting devices (10) detect the polishing end point of a substrate. A host computer is connected to the polishing end point detecting devices through a network. A polishing table (30) is connected to a table rotating motor (40) through a table shaft (30a). A top ring shaft (34) is connected to a top ring rotating motor (41) and rotates. A top ring (35) is connected to the lower side of the top ring shaft. The upper side of a polishing pad (32) comprises a polishing surface for polishing the substrate.</p> |
