METHOD OF REAL-TIMELY MEASUREING AND CALIBRATING INNER TEMPERATURE OF CHAMBER IN TEST HANDLER

摘要

PURPOSE: A method for measuring a temperature inside the chamber of a test handler and a method for controlling temperature in real time are provided to easily analyze temperature distribution by measuring the temperature of the inside of the chamber accurately in real time. CONSTITUTION: A tester is arranged inside a chamber and measures the self refresh current of each of plural semiconductor memory elements to be measured having the self refresh function of a linear temperature compensation type (S204). The tester generates temperature corresponding to each measured self refresh current value as the peripheral temperature data of each of plural semiconductor memory element to be measured (S206). The tester indicates the peripheral temperature data of each of plural semiconductor memory elements to be measured on a monitor in the form of a 2D map to be corresponded to the arranged state inside the chamber while simultaneously indicating sensor temperature data on the 2D map to be corresponded to the arrangement position inside the chamber of plural temperature sensors to be overlapped (S208). [Reference numerals] (AA) Start; (BB) End; (S202) Chamber sensor temperature (TS); (S204) DUTij ---> IDD6ij measurement; (S206) IDD6ij ---> T(DUTij) generation; (S208) Display of T(DUTij) and TS overlapped on a 2D map