PHASE PLATE DEVICE, METHOD FOR MANUFACTURING THE SAME, AND PHASE DIFFERENCE ELECTRON MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To provide a phase plate device having a long life capable of obtaining a phase difference electron microscope with high resolution, and also to provide a method for manufacturing the phase plate device, and a phase difference electron microscope.SOLUTION: A phase plate device is manufactured by performing the steps of: separating a substrate and a first carbon film after forming the first carbon film on the substrate heated to a predetermined temperature; supporting the first carbon film on a support having an opening so as to cover at least a part of the opening; and processing the first carbon film to form a phase plate, or by performing the steps of: supporting the first carbon film on the support having the opening so as to cover at least a part of the opening; processing the first carbon film to form a core phase plate; and heating and processing the first carbon film at a predetermined temperature.