发明名称 NANOSTRUCTURE DEVICE AND METHOD FOR MANUFACTURING NANOSTRUCTURES
摘要 A method for manufacturing a plurality of nanostructures (101) on a substrate (102). The method comprises the steps of: depositing a bottom layer (103) on an upper surface of the substrate (102), the bottom layer (103) comprising grains having a first average grain size; depositing a catalyst layer (104) on an upper surface of the bottom layer (103), the catalyst layer (104) comprising grains having a second average grain size different from the first average grain size, thereby forming a stack of layers comprising the bottom layer (103) and the catalyst layer (104); heating the stack of layers to a temperature where nanostructures (101) can form; and providing a gas comprising a reactant such that the reactant comes into contact with the catalyst layer (104).
申请公布号 US2013230736(A1) 申请公布日期 2013.09.05
申请号 US201013879617 申请日期 2010.10.18
申请人 KABIR MOHAMMAD SHAFIQUL;SMOLTEK AB 发明人 KABIR MOHAMMAD SHAFIQUL
分类号 D01F9/127;B05D3/10;C23C16/44 主分类号 D01F9/127
代理机构 代理人
主权项
地址