INERTIAL SENSOR

摘要

PROBLEM TO BE SOLVED: To provide an inertial sensor that can prevent crosstalk from being generated and also shorten a sampling rate time showing a maximum amplitude.SOLUTION: An inertial sensor 100 includes: a membrane 110; first driving means 141 and second driving means 143 that are provided in a first axial direction (X-axial direction) symmetrically with each other about a predetermined point C of the membrane 110 and vibrate while expanding and contracting in the first axial direction (X-axial direction); and third driving means 145 and fourth driving means 147 which are provided in a second axial direction (Y-axial direction perpendicular to the first axial direction (X-axial direction) symmetrically with each other about the predetermined point C of the membrane 110 and vibrate while expanding and contracting in the second axial direction (Y-axial direction). The first driving means 141 and the second driving means 143 are different in vibration frequency from each other so that the first driving means 141 and the second driving means 143 vibrate while expanding and contracting equally to each other after vibrating while expanding and contracting reversely to each other.