| 摘要 |
PURPOSE: A trap apparatus is provided to increase collection efficiency by including a cleaning unit which separates byproducts from a collecting unit to prevent the byproducts from being stacked on the collecting unit. CONSTITUTION: A housing(100) maintains a low pressure state by a vacuum pump. A collecting unit(200) is located in a byproduct path of the housing and collects byproducts. The collecting unit includes a plurality of collection tubes; and a heater which provides heat to the collection tubes. A cleaning unit(300) separates the byproducts from the collecting unit and includes a plurality of cleaning plates, a handler, and a motion assembly. |
