| 摘要 |
PROBLEM TO BE SOLVED: To provide a noncontact-type temperature detector capable of detecting a medical liquid, pure water, such a liquid as a mixed liquid of these, with sufficient responsivity in semiconductor or liquid crystal panel manufacturing equipment or the like. SOLUTION: In the base 200 of the noncontact-type temperature detector S1 connected between both pipes P8, P9, a rectangular pillar section 210 has a communication path 210a and a recessed part 210b, and the recessed part 210b is formed into a shape recessed towards the axial center part of the communication path 210a from the upside end surface 213 of the rectangular pillar 210. The bottom wall part 212b of the recessed part 210b constitutes a wall part of the peripheral walls of the communication path 210a, and is formed thinly. Into the bottom wall 330 of a housing 300 attached to the rectangular pillar 210 so as to close the recessed part 210b, a thermopile-type temperature sensor 340 is fitted, and faces the bottom wall 212b with the inside of the recessed part 210b in between. Based on heat radiation energy radiated from a liquid inside the communication path 210a into the recessed part 210b passing through the bottom wall 212b, the temperature sensor 340 detects the temperature of the liquid. COPYRIGHT: (C)2010,JPO&INPIT |
