METHOD FOR FABRICATING METAL NANOSTRUCTURES USING ZNO NANOROD AND ITS APPLICATION

摘要

PURPOSE: A manufacturing method for a metal nanostructure is provided to pattern a metal layer by using a zinc oxide nanorod pattern, thereby forming a metal nanostructure with a large area through a simplified process regardless of a kind of a substrate. CONSTITUTION: A manufacturing method for a metal nanostructure comprises following steps. A pattern of metal oxide nanorods (200) is formed on a substrate (100). A sacrifice layer (300) is formed on the surface of the exposed substrate by the pattern of nanorods. The sacrifice layer is left by removing the pattern of nanorods, and a part surface of the substrate is exposed. A metal layer (400) is deposited on the surface of the exposed substrate and the top of the sacrifice layer by forming the metal layer on the substrate in which the pattern of the nanorods is removed. And the only metal layer formed on the substrate is left by removing the sacrifice layer in which the metal layer is deposited. The sacrificial layer is photoresist. The metal layer comprises one or more alloys selected from a group consisting of platinum (Pt), iron (Fe), cobalt (Co), nickel (Ni), ruthenium (Ru), rhodium (Rh), palladium (Pd), osmium (Os), iridium (Ir), copper (Cu), silver (Ag), gold (Au), tin (Sn) and aluminum (Al).