发明名称 GAS LOCK, AND COATING APPARATUS COMPRISING A GAS LOCK
摘要 The present invention relates to a gas lock for separating two gas chambers, which while taking up minimal space makes it possible to achieve the separation of gases without contact with the product/educt/transporting system. The gas lock according to the invention is distinguished by the integration of a measuring chamber for measuring at least one physical and/or chemical property. Also, the present invention relates to a coating device which comprises a gas lock according to the invention. Also provided are possibilities for using the gas lock according to the invention.
申请公布号 EP2633098(A1) 申请公布日期 2013.09.04
申请号 EP20110776371 申请日期 2011.10.27
申请人 FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V. 发明人 POCZA, DAVID;REBER, STEFAN;ARNOLD, MARTIN;SCHILLINGER, NORBERT
分类号 C23C16/52;C23C16/44;C23C16/455;C23C16/54 主分类号 C23C16/52
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