发明名称 |
GAS LOCK, AND COATING APPARATUS COMPRISING A GAS LOCK |
摘要 |
The present invention relates to a gas lock for separating two gas chambers, which while taking up minimal space makes it possible to achieve the separation of gases without contact with the product/educt/transporting system. The gas lock according to the invention is distinguished by the integration of a measuring chamber for measuring at least one physical and/or chemical property. Also, the present invention relates to a coating device which comprises a gas lock according to the invention. Also provided are possibilities for using the gas lock according to the invention. |
申请公布号 |
EP2633098(A1) |
申请公布日期 |
2013.09.04 |
申请号 |
EP20110776371 |
申请日期 |
2011.10.27 |
申请人 |
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V. |
发明人 |
POCZA, DAVID;REBER, STEFAN;ARNOLD, MARTIN;SCHILLINGER, NORBERT |
分类号 |
C23C16/52;C23C16/44;C23C16/455;C23C16/54 |
主分类号 |
C23C16/52 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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