| 发明名称 |
RF-MEMS capacitive switches with high reliability |
| 摘要 |
A reliable long life RF-MEMS capacitive switch is provided with a dielectric layer comprising a "fast discharge diamond dielectric layer" and enabling rapid switch recovery, dielectric layer charging and discharging that is efficient and effective to enable RF-MEMS switch operation to greater than or equal to 100 billion cycles.
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| 申请公布号 |
US8525185(B2) |
申请公布日期 |
2013.09.03 |
| 申请号 |
US201113081683 |
申请日期 |
2011.04.07 |
| 申请人 |
GOLDSMITH CHARLES L.;AUCIELLO ORLANDO H.;CARLISLE JOHN A.;SAMPATH SURESH;SUMANT ANIRUDHA V.;CARPICK ROBERT W.;HWANG JAMES;MANCINI DERRICK C.;GUDEMAN CHRIS;UCHICAGO ARGONNE, LLC |
发明人 |
GOLDSMITH CHARLES L.;AUCIELLO ORLANDO H.;CARLISLE JOHN A.;SAMPATH SURESH;SUMANT ANIRUDHA V.;CARPICK ROBERT W.;HWANG JAMES;MANCINI DERRICK C.;GUDEMAN CHRIS |
| 分类号 |
G01L9/00 |
主分类号 |
G01L9/00 |
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