| 摘要 |
PROBLEM TO BE SOLVED: To provide a flow sensor which is capable of accurately measuring a minute flow change or an instantaneous flow fluctuation without mitigating reduction in size.SOLUTION: A flow sensor comprises a circular measuring chamber 11 which includes an inflow port 15 and an outflow port 16 and in which a fluid is circulated, an impeller 30 which is axially supported within the measuring chamber and rotated by receiving a pressure of the fluid circulating within the measuring chamber on the blade parts thereof, and a detector which detects a frequency of a magnetic flux change caused by the rotation of the impeller. Inside of the measuring chamber, between the inflow port and the outflow port, a virtual space is formed as a flow passage 18 of the fluid from an inner circumferential surface of the measuring chamber and a rotation track of distal ends of the blade parts of the impeller and inside of the flow passage, the inner circumferential surface of the measuring chamber is bent outer than inner wall surfaces of the inflow port and the outflow ports. |
