发明名称 |
LASER SCAN DEVICE AND LASER SCAN METHOD |
摘要 |
PROBLEM TO BE SOLVED: To provide a laser scan device and a laser scan method.SOLUTION: A laser scan device 100 includes: a laser scanning part 10 for scanning a laser beam 11; a first optical part 30 for converging the laser beam 11; a second optical part 50 for transmitting the laser beam 11 which has passed the first optical part 30; and a third optical part 60 for scanning the laser beam 11 which has passed the second optical part 50 on an object S to be measured. |
申请公布号 |
JP2013171288(A) |
申请公布日期 |
2013.09.02 |
申请号 |
JP20120152216 |
申请日期 |
2012.07.06 |
申请人 |
SAMSUNG ELECTRO-MECHANICS CO LTD |
发明人 |
KIM TAEG GYUM |
分类号 |
G02B26/10;G01B11/24;G01N21/956 |
主分类号 |
G02B26/10 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|