发明名称 LASER SCAN DEVICE AND LASER SCAN METHOD
摘要 PROBLEM TO BE SOLVED: To provide a laser scan device and a laser scan method.SOLUTION: A laser scan device 100 includes: a laser scanning part 10 for scanning a laser beam 11; a first optical part 30 for converging the laser beam 11; a second optical part 50 for transmitting the laser beam 11 which has passed the first optical part 30; and a third optical part 60 for scanning the laser beam 11 which has passed the second optical part 50 on an object S to be measured.
申请公布号 JP2013171288(A) 申请公布日期 2013.09.02
申请号 JP20120152216 申请日期 2012.07.06
申请人 SAMSUNG ELECTRO-MECHANICS CO LTD 发明人 KIM TAEG GYUM
分类号 G02B26/10;G01B11/24;G01N21/956 主分类号 G02B26/10
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