发明名称 |
METHOD FOR MANUFACTURING PATTERNED GRAPHENE AND PATTERNED GRAPHENE MANUFACTURED BY THE SAME |
摘要 |
<p>PURPOSE: A manufacturing method of patterned graphene, and patterned graphene manufactured thereby are provided to realize a large area process. CONSTITUTION: A manufacturing method of patterned graphene comprises the steps of: forming a graphene layer on a catalyst metal layer; forming a patterned film on the graphene layer; positioning a support layer on the patterned film; removing the catalyst metal layer; patterning the graphene layer by removing the patterned film; positioning a substrate (50) on the patterned graphene layer (21); and removing the support layer.</p> |
申请公布号 |
KR20130096837(A) |
申请公布日期 |
2013.09.02 |
申请号 |
KR20120018360 |
申请日期 |
2012.02.23 |
申请人 |
LG ELECTRONICS INC. |
发明人 |
JUNG, MYNG HEE;RHO, JONG HYUN;SEO, BYUNG HWA;MOON, JIN SAN |
分类号 |
C01B31/02;G03F7/004;H01L21/302 |
主分类号 |
C01B31/02 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|