SEMICONDUCTOR MANUFACTURING DEVICE AND SUBSTRATE HOLDER

摘要

PROBLEM TO BE SOLVED: To provide a substrate holder and a semiconductor manufacturing device, capable of adjusting substrate transfer position of a substrate transfer machine and suppressing degradation of in-plane uniformity of a mounted substrate.SOLUTION: A substrate manufacturing device includes: a substrate holder in which a top plate and a bottom plate are connected together by a plurality of posts extending vertically and a substrate in horizontal attitude is mounted in multiple stages at the posts; a processing chamber processing a substrate mounted on the substrate holder; and a heating part which is provided around the processing chamber, for heating the substrate in the processing chamber. The post of the substrate holder includes a post portion extending vertically and a support portion provided in multiple stages at the post portion to support the substrate. In at least one post among the plurality of posts, a post portion is formed such that an interval between a post portion and a substrate supported by the support portion at an upper end or a lower end of the post is narrower than an interval between the post portion and the substrate supported by the support portion at the central part of the post.