| 摘要 |
PROBLEM TO BE SOLVED: To provide a tactile sensor capable of detecting frictional force, flexibility and surface roughness for a measuring object.SOLUTION: The tactile sensor comprises: a substrate 10 in which a gas pressure chamber 13 is formed; a diaphragm 20 constituting a partition of an upper surface of the gas pressure chamber 13; stators 30 which are fixed on an upper surface of the substrate 10 and have reference surfaces 31 at an upper end; a contact 40 provided on an upper surface of the diaphragm 20; and detection elements 21-25 for detecting a vertical displacement and/or an inclination of the contact 40. An operation with reference to the reference surface 31 can detect frictional force, flexibility and surface roughness for a measuring object O by detecting the vertical displacement or the inclination of the contact 40. |
