发明名称 |
HALOGEN-CONTAINING GAS SUPPLY APPARATUS AND HALOGEN-CONTAINING GAS SUPPLY METHOD |
摘要 |
Disclosed is a halogen-containing gas supply apparatus for supplying a halogen-containing gas from a container filled with the halogen-containing gas at a high pressure to an external apparatus, the halogen-containing gas supply apparatus including: a supply tube connecting the container and the external apparatus; a supply valve attached to the supply tube to supply the halogen-containing gas from the container; and a shock wave prevention mechanism installed downstream of the supply valve to prevent generation of a shock wave.
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申请公布号 |
US2013221024(A1) |
申请公布日期 |
2013.08.29 |
申请号 |
US201113878292 |
申请日期 |
2011.09.07 |
申请人 |
YAO AKIFUMI;UMEZAKI TOMONORI;NAKAHARA KEITA;TAKEDA YUTA;CENTRAL GLASS COMPANY, LIMITED |
发明人 |
YAO AKIFUMI;UMEZAKI TOMONORI;NAKAHARA KEITA;TAKEDA YUTA |
分类号 |
F17C7/00;F16L55/027;F17C13/00 |
主分类号 |
F17C7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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