发明名称 EXHAUST GAS CLEANING METHOD
摘要 PROBLEM TO BE SOLVED: To provide an exhaust gas cleaning method by which minute dust contained in the exhaust gas can be highly efficiently removed.SOLUTION: An exhaust gas cleaning method is provided in which a mist, a water film, another mist, and another water film are formed in this order in a gas flow passage 32 through which the exhaust gas flows, along the flow direction of the exhaust gas. The mist comprises microparticulated water particles each having about 100 &mu;m diameter; and the exhaust gas is made to pass through a gas flow passage, so that the minute dust which is contained in the exhaust gas and has <1 &mu;m diameter, is stuck to the water particles constituting the mist by means of diffusion action thereof and the dust-stuck water particles are made to collide with the water film to remove the dust from the exhaust gas.
申请公布号 JP2013166146(A) 申请公布日期 2013.08.29
申请号 JP20130047996 申请日期 2013.03.11
申请人 EBARA CORP 发明人 ARAI HIROYUKI;KAWAMURA KOTARO;KASHIWAGI MAKOTO
分类号 B01D47/06;C23C16/44;F23J15/04;H01L21/205 主分类号 B01D47/06
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