| 摘要 |
PROBLEM TO BE SOLVED: To provide a handler capable of suppressing increase of loads concerned with control of a control unit for controlling temperatures of a plurality of components and complication of a cooling circuit when cooling a plurality of support parts for supporting the components, and a component inspection apparatus including the handler.SOLUTION: The handler includes: a first cooling passage 67A and second cooling passages 67B to 67D corresponding to respective storage pockets 17A to 17D; a first supply passage 66A; second supply passages 66B to 66D branched from the first supply passage 66A; a first throttle 73A for increasing a flow rate of a coolant in the second cooling passages 67B to 67D as compared with that of the first cooling passage 67A; heaters 69A to 69D for heating the respective storage pockets; temperature sensors 70A to 70D for detecting temperatures of the respective storage pockets; and a controller for controlling an opening/closing mode of a valve 63 and an output of the heater 69A and controlling an output of the heaters 69A to 69D so that detection values of the respective temperature sensors become a target temperature. |
