| 发明名称 |
SUBSTANTIALLY PLANAR ELECTRONIC DEVICES AND CIRCUITS |
| 摘要 |
A method of manufacturing a substantially planar electronic device is disclosed. The method employs a resist having three different thicknesses used for defining different structures in a single masking step. Examplary structures are substantially planar transistors having side-gates and diodes. |
| 申请公布号 |
WO2013124656(A1) |
申请公布日期 |
2013.08.29 |
| 申请号 |
WO2013GB50416 |
申请日期 |
2013.02.21 |
| 申请人 |
PRAGMATIC PRINTING LIMITED |
发明人 |
FRYER, ANTONY COLIN;PRICE, RICHARD DAVID |
| 分类号 |
H01L29/786;H01L27/12;H01L29/66;H01L29/78 |
主分类号 |
H01L29/786 |
| 代理机构 |
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