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发明名称
Inspection system and method with multi-image phase shift analysis
摘要
申请公布号
GB2470470(B)
申请公布日期
2013.08.28
申请号
GB20100008075
申请日期
2010.05.14
申请人
GENERAL ELECTRIC COMPANY
发明人
RALPH GERALD ISAACS;GUIJU SONG;JOSEPH BENJAMIN ROSS;JIANMING ZHENG;GIL ABRAMOVICH;KEVIN GEORGE HARDING
分类号
G01N21/88;G01B11/25
主分类号
G01N21/88
代理机构
代理人
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地址
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