| 摘要 |
PROBLEM TO BE SOLVED: To provide a pump device capable of stabilizing a discharge flow rate without depending on an external air temperature, and a method for controlling the same. SOLUTION: The control method for the pump device comprises: outputting a drive signal for driving a motor at a rotation speed for discharging a reference flow rate of gas from the discharge port of a pump body; measuring the temperature of gas discharged from the discharge port or the temperature of the pump body by a temperature sensor attached to the pump body; computing an actual flow rate of the gas discharged from the discharge port based on a gas-temperature related temperature signal included in the output of the temperature sensor; correcting the drive signal so that the actual flow rate may coincide with the reference flow rate; and outputting the corrected drive signal to the motor. COPYRIGHT: (C)2012,JPO&INPIT |
