发明名称 |
PIEZOELECTRIC ELEMENT AND METHOD FOR MANUFACTURING THE SAME |
摘要 |
A piezoelectric element is provided with a ceramic substrate including a first surface on which a groove is formed, and a first electrode formed on the first surface of the ceramic substrate and including a crossing part that extends over the groove. At least one void is formed between a bottom of the groove and the crossing part of the first electrode. |
申请公布号 |
US2013214647(A1) |
申请公布日期 |
2013.08.22 |
申请号 |
US201313770261 |
申请日期 |
2013.02.19 |
申请人 |
NGK INSULATORS, LTD;NGK INSULATORS, LTD |
发明人 |
OHNISHI TAKAO;SHIMIZU HIDEKI;UETANI MASAYUKI |
分类号 |
H01L41/047;H01L41/29 |
主分类号 |
H01L41/047 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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