发明名称
摘要 A technique of producing one or more electronic switching devices, each switching device comprising a semiconductor channel between two electrodes, and a dielectric element separating said semiconductor channel from a switching electrode, the method comprising: depositing onto a substrate a layer of material for at least partly forming said semiconductor channel or said dielectric element of said one or more switching devices by transferring said material onto said substrate from a rotating first roller.
申请公布号 JP2013533613(A) 申请公布日期 2013.08.22
申请号 JP20130512941 申请日期 2011.06.03
申请人 发明人
分类号 H01L21/368;H01L21/312;H01L21/336;H01L29/786;H01L51/05;H01L51/40 主分类号 H01L21/368
代理机构 代理人
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