发明名称 |
POLISHING PAD AND METHOD FOR PRODUCING SAME |
摘要 |
A polishing pad has a polishing layer including a non-foamed polyurethane, wherein the non-foamed polyurethane is a reaction cured body of a polyurethane raw material composition containing an isocyanate-terminated prepolymer obtained by reacting a prepolymer raw material composition containing a diisocyanate, a high-molecular-weight polyol and a low-molecular-weight polyol; an isocyanate modified body polymerized by adding three or more diisocyanates; and a chain extender, and the addition amount of the isocyanate-modified body is 5 to 30 parts by weight with respect to 100 parts by weight of the isocyanate-terminated prepolymer. The polishing pad hardly causes scratches on the surface of an object to be polished and has an improved dressing property.
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申请公布号 |
US2013217309(A1) |
申请公布日期 |
2013.08.22 |
申请号 |
US201013881341 |
申请日期 |
2010.10.26 |
申请人 |
NAKAI YOSHIYUKI;OGAWA KAZUYUKI;NAKAMURA KENJI;TOYO TIRE & RUBBER CO., LTD. |
发明人 |
NAKAI YOSHIYUKI;OGAWA KAZUYUKI;NAKAMURA KENJI |
分类号 |
B24B37/24;H01L21/304 |
主分类号 |
B24B37/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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