发明名称 POLISHING PAD AND METHOD FOR PRODUCING SAME
摘要 A polishing pad has a polishing layer including a non-foamed polyurethane, wherein the non-foamed polyurethane is a reaction cured body of a polyurethane raw material composition containing an isocyanate-terminated prepolymer obtained by reacting a prepolymer raw material composition containing a diisocyanate, a high-molecular-weight polyol and a low-molecular-weight polyol; an isocyanate modified body polymerized by adding three or more diisocyanates; and a chain extender, and the addition amount of the isocyanate-modified body is 5 to 30 parts by weight with respect to 100 parts by weight of the isocyanate-terminated prepolymer. The polishing pad hardly causes scratches on the surface of an object to be polished and has an improved dressing property.
申请公布号 US2013217309(A1) 申请公布日期 2013.08.22
申请号 US201013881341 申请日期 2010.10.26
申请人 NAKAI YOSHIYUKI;OGAWA KAZUYUKI;NAKAMURA KENJI;TOYO TIRE & RUBBER CO., LTD. 发明人 NAKAI YOSHIYUKI;OGAWA KAZUYUKI;NAKAMURA KENJI
分类号 B24B37/24;H01L21/304 主分类号 B24B37/24
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