| 摘要 |
PURPOSE: A diamond heat spreader and a manufacturing method thereof are provided to maximize heat conductivity by increasing a ratio of columnar particles which are horizontally arranged on a substrate. CONSTITUTION: The cross section of a diamond crystal structure has a radial columnar structure. Columnar particles are radially arranged on the radial columnar structure. Each radial columnar structure is grown around a seed point by a chemical vapor deposition process. The seed point is locally formed on the substrate. Diamond particles are separately arranged on the substrate. [Reference numerals] (AA) Radial columnar tissue; (BB) Diamond columnar particle; (CC) Grain boundary; (DD) Substrate; (EE) Seed point |
