| 摘要 |
PURPOSE: A handler and a part inspecting apparatus are provided to suppress excessive cooling of a stage or pressure change due to vaporization of a liquefied gas. CONSTITUTION: According to a handler (10), a robot (30) returns parts. The part is supported by a stage. A supply part is supplied with a liquefied gas which is a liquidized gas. A supply path connects the path in the stage and the supply part. A valve opens and closes the supply path. A heater heats the stage. A temperature sensor detects the temperature of the stage. A control part controls the output of the heater and the opening/closing of the valve, in order for the detected temperature of the temperature sensor to be a predetermined temperature. A vaporization vessel is interposed in the halfway of the supply path, and vaporizes the liquefied gas as having larger fluid path cross section than the supply path. |
