| 摘要 |
PROBLEM TO BE SOLVED: To provide a compact vibration device whose frequency response does not degrade much against a change in ambient temperature.SOLUTION: A vibration device 1 of the present invention comprises a substrate 3, a lid 4 joined to the substrate 3 and constituting a cavity 5, and a vibration piece 6 housed in the cavity 5. The vibration piece 6 includes a middle portion 7 large in thickness and a peripheral portion 8 small in thickness. The middle portion 7 includes an excitation electrode 9, while the peripheral portion 8 electrically connects to excitation electrodes 9a and 9b and includes first and second terminal electrodes 10a and 10b greater in thickness than the excitation electrode 9. The substrate 3 has first and second connection portions 12a and 12b provided on its surface, the first and second connection portions 12a and 12b being connected to the first and second terminal electrodes 10a and 10b to support the vibration piece 6 in cantilever form. This enables the vibration piece 6 to be supported on a very small junction area, making it possible to realize a compact vibration device whose frequency response does not degrade much against a change in ambient temperature. |
