POLISHING PAD WITH MULTI-MODAL DISTRIBUTION OF PORE DIAMETERS
摘要
Polishing pads with multi-modal distributions of pore diameters are described. Methods of fabricating polishing pads with multi-modal distributions of pore diameters are also described.
申请公布号
EP2627478(A1)
申请公布日期
2013.08.21
申请号
EP20110773633
申请日期
2011.10.11
申请人
NEXPLANAR CORPORATION
发明人
HUANG, PING;SCOTT, DIANE;LACASSE, JAMES, P.;ALLISON, WILLIAM C.
