| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a pellicle housing container which prevents a tray from contacting a pellicle film when a bottom surface of the tray is thrust up by a pawl of a lifter during transfer. <P>SOLUTION: The pellicle housing container includes: the tray on which the pellicle is placed; a cover which covers the top surface of the tray; and legs disposed on the bottom surface of the tray. The tray includes: an outer peripheral part of which a part of the top surface is brought into contact with either the pellicle or the cover when the pellicle is housed and of which a part of the bottom surface is in contact with the legs; and an inner peripheral part which locates inside the outer peripheral part and of which the top surface is in contact with neither the pellicle nor the cover. The outer peripheral part includes a frame material between the top surface and the bottom surface, and the inner peripheral part includes a hollow part between the top surface and the bottom surface. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
