GAS TEMPERATURE/HUMIDITY REGULATION METHOD AND GAS SUPPLY DEVICE

摘要

When a gas containing an amount of water vapor equivalent to that contained in the gas at the desired temperature Td and the desired relative humidity Hd is assumed, and the temperature of the gas of when its relative humidity is 100% is defined as an intermediate target temperature Tc, the intermediate target temperature Tc can be calculated from the desired temperature Td and the desired relative humidity Hd. The gas is mixed with water vapor to increase the temperature of the gas to the intermediate target temperature Tc while increasing the relative humidity of the gas to 100%. The gas heated to the intermediate target temperature Tc is heated to the desired temperature Td while maintaining the amount of water vapor contained therein so as to regulate the relative humidity of the gas to the desired relative humidity Hd. Gas maintained at the desired temperature and the desired humidity can thus be stably supplied.