PROCESS APPARATUS, IN PARTICULAR FOR PROCESSING AND/OR INSPECTING SUBSTRATES

摘要

A process machine and a related method for treating and/or inspecting printed circuit boards, solar cells or the like, has at least one transport device for transporting the substrates and at least one process device for processing the substrates. The transport device and process device are both separate, self-supporting, modular units. The modular units can be selectively combined with one another in such a way that the transport device undertakes the transportation of the substrates through the process device.