| 摘要 |
An apparatus for measuring a shape of a surface, comprises a measurement head which measures a distance between a reference point and the surface by detecting interference between test light obtained when light that passes through the reference point is emitted, is reflected by the surface, and returns to the reference point, and reference light, a scanning mechanism which scans the measurement head, and a processor which calculates the shape of the surface based on the distance measured using the measurement head and coordinates of the reference point.
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