发明名称 Memory devices and method of manufacturing the same
摘要 Memory devices and methods of forming memory devices including forming a plurality of preliminary electrodes, each of the plurality of preliminary electrodes including a protruding region, protruding from a first mold insulating layer, forming a second mold insulating layer on the first mold insulating layer, removing at least a portion of the plurality of preliminary electrodes to form a plurality of openings in the second mold insulating layer and a plurality of lower electrodes, and forming a plurality of memory elements in the plurality of openings. Memory devices and methods of forming memory devices including forming one or more insulating layers on sidewalls of all or part of a plurality of lower electrodes and/or a plurality of memory elements.
申请公布号 US8513136(B2) 申请公布日期 2013.08.20
申请号 US201213484999 申请日期 2012.05.31
申请人 PARK DOO-HWAN;OH GYU-HWAN;KWON DONG-WHEE;CHUNG KYUNG-MIN;SAMSUNG ELECTRONICS CO., LTD. 发明人 PARK DOO-HWAN;OH GYU-HWAN;KWON DONG-WHEE;CHUNG KYUNG-MIN
分类号 H01L21/302;H01L21/461 主分类号 H01L21/302
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