发明名称 |
INFORMATION RECORDING MEDIUM PATTERN FORMING METHOD, NANOIMPRINT MOLD, AND INFORMATION RECORDING MEDIUM |
摘要 |
PROBLEM TO BE SOLVED: To provide a bit patterned medium having isolated recording material particles disposed with high density over the entire information recording surface, and a pattern forming method thereof.SOLUTION: The pattern forming method includes the steps of: forming one or more pairs of dot rows having arc-like physical and/or chemical contrast on a base plate; forming a thin film of polymer block copolymers which form a microphase-separated structure on the base plate formed with the pairs of dot rows; and removing a micro domain or a domain other than the micro domain of the polymer block copolymers thin film from the base plate. |
申请公布号 |
JP2013161508(A) |
申请公布日期 |
2013.08.19 |
申请号 |
JP20120024133 |
申请日期 |
2012.02.07 |
申请人 |
PANASONIC CORP |
发明人 |
SATO HIDEJI;HISADA KAZUYA;KAWASAKI TAKASHI |
分类号 |
G11B5/84;B29C59/02;G11B5/65;G11B5/855 |
主分类号 |
G11B5/84 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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