| 摘要 |
PROBLEM TO BE SOLVED: To provide a MEMS device which allows an optical component to be inclined around a plurality of rotation axes.SOLUTION: A laser scanning unit 1 (MEMS device) includes an optical scanning part 10 (movable frame 16) and driving parts 21 and 22 each including driving units 30 each having first and second driving parts 40 and 50 and a connection part 60 and inclining the optical scanning part 10. Each first driving part 40 is divided into a first driving portion 41 on the X2 side and a second driving portion 42 on the X1 side, and each driving part 50 is divided into a third driving portion 51 on the X1 side and a fourth driving portion 52 on the X2 side. The first driving portion 41, the second driving portion 42, the third driving portion 51, and the fourth driving portion 52 are controlled to be driven independently of one another to incline the optical scanning part 10. |
