CHARGED PARTICLE BEAM DEVICE AND WIRING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a wiring method and a charged particle beam device that achieve wiring processing without using gas deposition or the like in a vacuum chamber of the charged particle beam device.SOLUTION: There are provided a wiring method and a charged particle beam device that form a wire of an ion liquid by dripping the ion liquid on a sample table or preparing the ion liquid on the sample table where a sample is placed in advance and irradiating a wiring track between a wiring processing start point and a wiring processing end point with a charged particle beam. With this configuration, the wiring processing can be achieved in a vacuum chamber of the charged particle beam device without using a gas deposition method or the like.