发明名称 OSCILLATION MIRROR ELEMENT AND ELECTRONIC APPARATUS WITH PROJECTOR FUNCTION
摘要 PROBLEM TO BE SOLVED: To provide an oscillation mirror element capable of correcting a warp of a mirror part in manufacturing to make the mirror part into a flat surface shape with accuracy.SOLUTION: A potable projector 100 (an electronic apparatus having projector function) includes a mirror part 11 including a reflection surface 11a for reflecting light, torsion bars 12 and 13 connected to the mirror part 11 and supporting the mirror part 11 so as to be oscillatable around a shaft line 500, and driving units 16 and 17 connected to bars 14 and 15 and oscillation-driving the mirror part 11 through the bars 14 and 15. The mirror part 11 is provided with a warp correction piezoelectric layer 32 for displacing the mirror part 11 so as to correct a warp in manufacturing the mirror part 11, by applying voltage.
申请公布号 JP2013160891(A) 申请公布日期 2013.08.19
申请号 JP20120021982 申请日期 2012.02.03
申请人 FUNAI ELECTRIC CO LTD 发明人 INOUE NAOKI;MURAYAMA MANABU;KUGO KOUICHI;FUJII HITOSHI
分类号 G02B26/10;B06B1/06;H01L41/09;H01L41/187 主分类号 G02B26/10
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