| 摘要 |
PROBLEM TO BE SOLVED: To provide a cryopump reduced in the likelihood of interference with the design of a target to which the cryopump is attached.SOLUTION: A cryopump 10 includes a low-temperature cryopanel 18, a high-temperature cryopanel 20 provided outside the low-temperature cryopanel 18, and a housing 38 provided outside the high-temperature cryopanel 20. The high-temperature cryopanel 20 includes an extension panel 34 extending outward. The housing 38 includes an inlet flange 56 surrounding the extension panel 34. |
