| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique for suitably manufacturing a laminate for temporarily fastening a support body to a substrate.SOLUTION: A method for manufacturing a laminate having a substrate, a support body, and an isolation layer comprises the steps of: increasing a temperature in the support body carried into a reaction chamber and a temperature in the reaction chamber by plasma processing (preparatory processing step); and forming an isolation layer (isolation layer forming step) on the support body by supplying a material gas serving as the isolation layer into the reaction chamber after the preparatory processing step. |
