发明名称 METHOD FOR MANUFACTURING GLASS SUBSTRATE, METHOD FOR MANUFACTURING PACKAGE, PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC EQUIPMENT, AND RADIO-CONTROLLED CLOCK
摘要 PROBLEM TO BE SOLVED: To improve glass frit adhesion in an interface between an inner wall surface of a through hole of a glass substrate and a glass frit filled in the through hole.SOLUTION: A method for manufacturing a glass substrate having a through hole penetrating a base substrate composed of a glass material in a thickness direction comprises: a step S37 of filling a glass frit between a through hole for fixing a metal pin inserted into the through hole penetrating the base substrate in the thickness direction and the metal pin (filling step); and a step S35 of cleaning the base substrate with a hydrofluoric acid (through hole cleaning step). The through hole cleaning step is performed before the filling step.
申请公布号 JP2013162170(A) 申请公布日期 2013.08.19
申请号 JP20120020090 申请日期 2012.02.01
申请人 SEIKO INSTRUMENTS INC 发明人 FUJIHIRA YOICHI
分类号 H03H3/02;H01L23/08;H03B5/32;H03H9/02;H03H9/10 主分类号 H03H3/02
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