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发明名称
THERMAL CATHODE TYPE IONIZATION VACUUM METER
摘要
申请公布号
JPH0618348(A)
申请公布日期
1994.01.25
申请号
JP19910299687
申请日期
1991.10.19
申请人
SUKEGAWA ELECTRIC CO LTD
发明人
WATANABE FUMIO
分类号
G01L21/30;G01L21/32;(IPC1-7):G01L21/30
主分类号
G01L21/30
代理机构
代理人
主权项
地址
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