SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SUBSTRATE FOR SOLAR CELL

摘要

PROBLEM TO BE SOLVED: To provide a substrate processing apparatus capable of heating a plurality of substrates housed in a reaction chamber in a short time while keeping a temperature uniform.SOLUTION: A substrate processing apparatus comprises a reaction chamber in which a plurality of glass substrates are housed side by side to have the substrate surfaces of the respective substrates opposed to one another, a gas supply section supplying a processing gas into the reaction chamber, an exhaust ventilation section which exhausts the atmosphere in the reaction chamber, a heating section provided between the substrate surfaces of the plurality of glass substrates housed in the reaction chamber, and a fan provided in the reaction chamber and circulating the atmosphere in the reaction chamber.