VACUUM SUCTION DEVICE AND METHOD FOR MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a vacuum suction device capable of improving the smoothness of a placement surface of a porous body and a method for manufacturing the same.SOLUTION: A placemen part 1 made of a ceramic porous body for adsorbing and holding an object on a placement surface 10 is configured by binding ceramic particles as skeleton grain by binder particles. The porosity of the placement part 1 is within the range of 25-45%. The median diameter of a pore in the placement part 1 is 15 (μm) or below. The integrated capacity of pores having a diameter of 25 (μm) or more among pores in the placement part 1 is 0.02 (ml/g) or below.