APPARATUS AND METHOD FOR INSPECTING DEFECT OF SOLAR CELL, AND PROGRAM

摘要

PROBLEM TO BE SOLVED: To provide a solar cell defect inspection apparatus that uses excitation emission of a solar cell without using a darkroom, and to provide a defect inspection method and a program.SOLUTION: A defect inspection apparatus 100 includes: power source means 102 that applies a forward voltage to a solar cell 110 to be tested to emit light by excitation; imaging means 104 for capturing an image of the solar cell 110; image processing means 108 for processing the image captured by the imaging means 104; and output means 148 that outputs the image processed by the image processing means 108. The imaging means 104 includes: an optical filter 12 that transmits light near a wavelength band of light emitted by excitation from the solar cell 110; a photoelectric image conversion element 13 for converting the light passing through the optical filter 12 to visible light; and an imaging element 132 that images the visible light converted by the photoelectric image conversion element 13 on an imaging surface to capture an image of the solar cell 110 emitting the light by excitation.