| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique capable of preventing inspection regions of other inspection heads from being irradiated with the light irradiated from an illumination unit of each of a plurality of inspection heads (illumination interference).SOLUTION: An inspection device comprises a first inspection head, a second inspection head, and a shielding unit. The first inspection head and the second inspection head respectively have an illumination unit which irradiates an inspection object with light and an imaging unit which images the inspection object irradiated with light by the illumination unit in an inspection region. The shielding unit is located between the first inspection head and the second inspection head, and shields the light irradiated from each irradiation unit of the first inspection head and the second inspection head so that the inspection regions of other inspection heads are not irradiated with the light irradiated from each irradiation unit. |
