发明名称 POLISHING COMPOSITION
摘要 PROBLEM TO BE SOLVED: To provide a polishing composition capable of being suitably used for an application in which an object to be polished having a phase change alloy is polished, and specifically to provide a polishing composition which is highly effective in the suppression of recess formation.SOLUTION: A polishing composition of the present invention is a polishing composition used for an application in which an object to be polished having a phase change alloy is polished, and contains at least one or more selected from a compound in which two carbonyl groups contained in the molecule are bonded to a carbon atom at the 1-position and a carbon atom at the 3-position.
申请公布号 JP2013157582(A) 申请公布日期 2013.08.15
申请号 JP20120019452 申请日期 2012.02.01
申请人 FUJIMI INC 发明人 IZAWA YOSHIHIRO;YOSHIZAKI YUKINOBU
分类号 H01L21/304;B24B37/00;C09K3/14 主分类号 H01L21/304
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